Technical characteristics A refrigerant control system

Technical characteristics:

1. A refrigerant control system for controlling the flow of a refrigerant in a circulating flow path connected to a compression zone and circulates the refrigerant compressed by the compression zone so that the refrigerant and a cooling body For heat exchange, the refrigerant control system includes: a storage area to store the refrigerant; The refrigerant in the outlet-side pipe flows into the storage area through the first pipe; a second pipe is connected to an inlet-side pipe constituting the circulation flow path and is located at an inlet side of the compression area, so that the storage area The refrigerant flows into the inlet side pipe through the second pipe; a third pipe is connected to the inlet side pipe, which is formed so that the heat of the third pipe is lower than the heat of the outlet pipe, thereby allowing The refrigerant that transfers heat to the storage area; a first on-off valve arranged in the first pipeline, and the refrigerant in the outlet side pipe is allowed to flow into the storage area by switching the first on-off valve; a second switch The valve is arranged in the second pipeline, and the refrigerant in the storage area is allowed to flow into the inlet side pipe by switching the second on-off valve; a third on-off valve is arranged in the third pipeline, and by switching the third The switch valve allows the refrigerant in an upstream part of the third pipeline associated with the storage area to flow into the part of the third pipeline located on the side of the storage area; and a switch control area, according to a Setting temperature controls to open or close the first on-off valve, the second on-off valve, and the third on-off valve. 2. The refrigerant control system of claim 1, wherein when the set temperature of the cooling body is higher than a critical temperature of the refrigerant, the switch control area opens the first switch valve and the third switch Valve, and close the second on-off valve; when the set temperature of the cooling body is lower than the critical temperature of the refrigerant, close the first on-off valve and the third on-off valve, and open the second on-off valve . 3. The refrigerant control system of claim 2, wherein at least when an operating pressure value of the compression zone obtained by a predetermined method is higher than a threshold value, or the set temperature of the cooling body is higher than that of the refrigerant At the critical temperature, the switch control zone opens the first switch valve and the third switch valve, and closes the second switch valve; at least when an operating pressure value of the compression zone obtained by the predetermined method is lower than the threshold, Or when the set temperature of the cooling body is lower than the critical temperature of the refrigerant, the first on-off valve and the third on-off valve are closed, and the second on-off valve is opened. 4. The refrigerant control system according to any one of claims 1 to 3, further comprising: a fourth pipe connected to the outlet side pipe, which is formed so that the heat of the fourth pipe is higher than that of the first pipe. The heat of the three pipelines, thereby allowing the heat to be transferred to the refrigerant in the storage area; and a fourth on-off valve, arranged in the fourth pipeline, to give way to the fourth pipeline by switching the fourth on-off valve The refrigerant in an upstream part associated with the storage area flows into the side of the storage area of the fourth pipeline; wherein the switch control area is controlled to open or control according to the set temperature of the cooling body The first on-off valve, the second on-off valve, the third on-off valve, and the fourth on-off valve are closed. 5. The refrigerant control system of claim 4, wherein when the set temperature of the cooling body is higher than the critical temperature of the refrigerant, the switch control area opens the first switch valve and the third switch Valve, and close the second on-off valve and the fourth on-off valve; when the set temperature of the cooling body is lower than the critical temperature of the refrigerant, close the first on-off valve and the third on-off valve, and Turn on the second on-off valve and the fourth on-off valve. 6. The refrigerant control system according to any one of claims 1 to 5, wherein by forming a first sub-pipe

And a second sub-pipe to prevent the refrigerant in the storage portion 30 from flowing into the outlet-side pipe or the inlet-side pipe through the first sub-pipe and the second sub-pipe in reverse, the first sub-pipe and the first sub-pipe Each part of the two sub-pipes is located above other parts of the refrigerant control system according to claim 1, and further includes an inflow prevention zone for preventing foreign substances from flowing into the storage zone through the first pipeline. 7. The refrigerant control system according to any one of claims 1 to 6, wherein by forming a first sub-pipe and a second sub-pipe, the refrigerant in the storage part can be prevented from passing through the first sub-pipe. The pipe and the second sub-pipe flow into the outlet-side pipe or the inlet-side pipe in a reverse direction, and the parts of the first sub-pipe and the second sub-pipe are located above other parts. 8. The refrigerant control system according to any one of claims 1 to 7, further comprising a temperature adjustment area, the temperature adjustment area adjusting a temperature of the refrigerant in the storage area. 9. The refrigerant control system according to any one of claims 1 to 8, wherein the refrigerant is carbon dioxide. 10. The refrigerant control system according to any one of claims 1 to 9, wherein the cooling body is used for cooling a refrigerant of a semiconductor processing system. 11. A cooling system, which uses a refrigerant to cool a cooling body, the cooling system comprising: a compression zone for compressing the refrigerant; a circulation flow path including a cooling body side tube connected to the cooling body side tube The compression zone is located on the side of the cooling body and circulates the refrigerant so that the refrigerant compressed in the compression zone exchanges heat with the cooling body; a refrigeration system according to any one of claims 1 to 10 Agent control system; and a heat exchange area, arranged on the side tube of the cooling body and allowing the refrigerant in the side tube of the cooling body to exchange heat with the cooling body. 12. The cooling system of claim 11, wherein the heat exchange area comprises a first heat exchange area and a second heat exchange area, the first heat exchange area cools the cooling body, and the second heat exchange area heats The cooling body cooled by the first heat exchange zone; wherein the cooling body side tube includes a first cooling body side tube and a second cooling body side tube, and the first cooling body side tube is located in the first heat exchange zone The side tube of the second cooling body is located on the side of the second heat exchange zone, wherein the cooling system further includes: a detection zone for detecting the temperature of the outlet side tube or the inlet side tube The temperature; a fifth pipeline connected with an upstream portion of the first heat exchange area of the first cooling body side pipe and the inlet side pipe; a fifth on-off valve is provided in the fifth pipeline, the The fifth on-off valve is used to adjust the amount of the refrigerant in the cooling body side pipe flowing into the inlet side pipe; and the on-off control area controls the opening angle of the fifth on-off valve according to a detection result of the detection area. 13. The cooling system of claim 12, further comprising: a sixth on-off valve, which is disposed in an upstream portion of the first heat exchange zone in the side pipe of the first cooling body, and the sixth on-off valve adjusts the first The amount of the refrigeration flowing into the first heat exchange zone in the cooling body side tube; and a seventh on-off valve arranged at a downstream portion of the second heat exchange zone in the second cooling body side tube, and the seventh on-off valve adjusts The amount of the refrigerant that exchanges heat with the second heat exchange zone and flows into the inlet side pipe; wherein the switch control zone controls the sixth switch valve and the refrigerant according to a temperature of the cooling body obtained by a predetermined method The opening angle of the seventh on-off valve. 14. The cooling system of claim 12 or claim 13, further comprising a compression control zone, the compression control zone

The compression zone is controlled according to the detection result of the detection zone and the temperature of the cooling body obtained by the predetermined method. 15. The cooling system according to any one of claims 12 to 14, further comprising a refrigerant heat exchange area, the refrigerant heat exchange area giving way to the first heat exchange of the first cooling body side tube The refrigerant in the upstream part of the zone exchanges heat with the refrigerant in the downstream part of the second heat exchange zone in the second cooling body side tube

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